Manufacturing integrated circuits using phase-shifting masks
A Standard patent application filed on 26 December 2001 credited to Sharan, Atul ; Pati, Yagyensh (Buno) ; Weed, J. Tracy ; Pierrat, Christophe

Details

Application number :

2002229132  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Manufacturing integrated circuits using phase-shifting masks  

Inventor :

Sharan, Atul ; Pati, Yagyensh (Buno) ; Weed, J. Tracy ; Pierrat, Christophe  

Agent name :

 

Address for service :

 

Filing date :

26 December 2001  

Associated companies :

 

Applicant name :

NUMERICAL TECHNOLOGIES, INC.  

Applicant address :

70 West Plumeria Drive, San Jose, CA 95134-2134  

Old name :

 

Original Source :

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