Semiconductor device with fuse, resistor, diffusion barrier or capacitor of a refractory metal-silicon-nitrogen compound
A Standard patent application filed on 21 December 2001 credited to Cabral, Cyril
;
Hsu, Louis Lu-Chen
;
Clevenger, Lawrence
;
Wong, Keith Kwong Hon
Details
Application number :
2002216238
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor device with fuse, resistor, diffusion barrier or capacitor of a refractory metal-silicon-nitrogen compound
Inventor :
Cabral, Cyril
;
Hsu, Louis Lu-Chen
;
Clevenger, Lawrence
;
Wong, Keith Kwong Hon