Method for producing high purity low dielectric constant ceramic and hybrid ceramic films field of the invention
A Standard patent application filed on 14 September 2001 credited to Coyle, Christopher A.
;
Dunham, Glen C.
;
Fryxell, Glen E.
;
Baskaran, Suresh
;
Williforn, Ralph E.
;
Xiaohong, Shari Li
;
Birnbaum, Jerome C.
Details
Application number :
2002211229
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for producing high purity low dielectric constant ceramic and hybrid ceramic films field of the invention
Inventor :
Coyle, Christopher A.
;
Dunham, Glen C.
;
Fryxell, Glen E.
;
Baskaran, Suresh
;
Williforn, Ralph E.
;
Xiaohong, Shari Li
;
Birnbaum, Jerome C.
Agent name :
Address for service :
Filing date :
14 September 2001
Associated companies :
Applicant name :
BATTELLE MEMORIAL INSTITUTE
Applicant address :
902 Battelle Blvd., P.O. Box 999, Richland, WA 99352