Tool and method for in situ vapor phase deposition source material reloading andmaintenance
A Standard patent application filed on 14 September 2001 credited to Bullock, Daniel W. ; Labella, Vincent P. ; Thibado, Paul M.

Details

Application number :

2001290869  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Tool and method for in situ vapor phase deposition source material reloading andmaintenance  

Inventor :

Bullock, Daniel W. ; Labella, Vincent P. ; Thibado, Paul M.  

Agent name :

 

Address for service :

 

Filing date :

14 September 2001  

Associated companies :

 

Applicant name :

Board of Trustees of the University of Arkansas  

Applicant address :

 

Old name :

 

Original Source :

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