Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
A Standard patent application filed on 08 August 2001 credited to Guzman, Andrew J. ; La Fiandra, Carlo ; Sidor, Ronald P. ; Nelson, Michael L. ; Ivaldi, Jorge S.

Details

Application number :

2001281129  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems  

Inventor :

Guzman, Andrew J. ; La Fiandra, Carlo ; Sidor, Ronald P. ; Nelson, Michael L. ; Ivaldi, Jorge S.  

Agent name :

 

Address for service :

 

Filing date :

08 August 2001  

Associated companies :

 

Applicant name :

Silicon Valley Group Inc  

Applicant address :

 

Old name :

 

Original Source :

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