Absorbing compounds for spin-on glass anti-reflective coatings for photolithography
A Standard patent application filed on 12 July 2001 credited to Wu, Hui-Jung ; Drage, James ; Baldwin, Teresa ; Spear, Richard ; Richey, Mary

Details

Application number :

2001280558  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Absorbing compounds for spin-on glass anti-reflective coatings for photolithography  

Inventor :

Wu, Hui-Jung ; Drage, James ; Baldwin, Teresa ; Spear, Richard ; Richey, Mary  

Agent name :

 

Address for service :

 

Filing date :

12 July 2001  

Associated companies :

 

Applicant name :

Honeywell International, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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