Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same
A Standard patent application filed on 10 July 2001 credited to Smits, Johannes G.
Details
Application number :
2001280500
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same