Method of forming conductive interconnections wherein a barrier layer is removed by an etching process
A Standard patent application filed on 26 July 2001 credited to Ryan, Errol Todd
;
Mauersberger, Frank
;
Hause, Frederick N.
;
Brennan, William S.
;
Besser, Paul R.
;
Beckage, Peter J.
;
Iacoponi, John A.
Details
Application number :
2001279032
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of forming conductive interconnections wherein a barrier layer is removed by an etching process
Inventor :
Ryan, Errol Todd
;
Mauersberger, Frank
;
Hause, Frederick N.
;
Brennan, William S.
;
Besser, Paul R.
;
Beckage, Peter J.
;
Iacoponi, John A.