Multi beam charged particle device
A Standard patent application filed on 27 April 2001 credited to Winkler, Dieter ; Feuerbaum, Hans-Peter ; Degenhardt, Ralf ; Adamec, Pavel ; Munack, Harry

Details

Application number :

2001273976  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Multi beam charged particle device  

Inventor :

Winkler, Dieter ; Feuerbaum, Hans-Peter ; Degenhardt, Ralf ; Adamec, Pavel ; Munack, Harry  

Agent name :

 

Address for service :

 

Filing date :

27 April 2001  

Associated companies :

 

Applicant name :

ICT Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik MBH  

Applicant address :

 

Old name :

 

Original Source :

Go