End point detection system for chemical mechanical polishing applications
A Standard patent application filed on 26 June 2001 credited to Mikhaylich, Katrina A. ; Gotkis, Yehiel ; Ravkin, Mike

Details

Application number :

2001271468  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

End point detection system for chemical mechanical polishing applications  

Inventor :

Mikhaylich, Katrina A. ; Gotkis, Yehiel ; Ravkin, Mike  

Agent name :

 

Address for service :

 

Filing date :

26 June 2001  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94568  

Old name :

 

Original Source :

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