Self teaching robotic wafer handling system
A Standard patent application filed on 30 April 2001 credited to D'Souza, Kevin D. ; Harding, Nathan H. ; Aggarwal, Sanjay K. ; Wiggers, Robert T. ; Sagues, Paul

Details

Application number :

2001259294  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Self teaching robotic wafer handling system  

Inventor :

D'Souza, Kevin D. ; Harding, Nathan H. ; Aggarwal, Sanjay K. ; Wiggers, Robert T. ; Sagues, Paul  

Agent name :

 

Address for service :

 

Filing date :

30 April 2001  

Associated companies :

 

Applicant name :

Berkeley Process Control, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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