Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supplyvessels
A Standard patent application filed on 27 April 2001 credited to Carpenter, Kent ; Dietz, James

Details

Application number :
2001257367  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supplyvessels  
Inventor :
Carpenter, Kent ; Dietz, James  
Agent name :
 
Address for service :
 
Filing date :
27 April 2001  
Associated companies :
 
Applicant name :
Advanced Technology Materials, Inc.  
Applicant address :
 
Old name :
 
Original Source :
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