Retaining ring for holding semiconductor wafers in a chemical-mechanical polishing device
A Standard patent application filed on 01 October 2003 credited to Ensinger, Wilfried
Details
Application number :
2003287956
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Retaining ring for holding semiconductor wafers in a chemical-mechanical polishing device