Details

Application number :
2003287956  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Retaining ring for holding semiconductor wafers in a chemical-mechanical polishing device  
Inventor :
Ensinger, Wilfried  
Agent name :
 
Address for service :
 
Filing date :
01 October 2003  
Associated companies :
 
Applicant name :
ENSINGER KUNSTSTOFFTECHNOLOGIE GBR  
Applicant address :
Rudolf-Diesel-Strasse 8, 71154 Nufringen  
Old name :
 
Original Source :
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